8 CalEucentricFocus_View

Example 8. CalEucentricFocus_View

 
MacroName CalEucentricFocus_View
# macro to quickly calbrate EucentricFocus value using View in LD. 
# update @ 2014-10-21 12:28:58

Echo ===> Running CalEucentricFocus_View ...

# use SEM built-in wobbling way to get to Eucentricity
Eucentricity 3

## record original TargetDefocus
ReportTargetDefocus 
orig = $reportedValue1

## make sure TargetDefocus is at 0
SetTargetDefocus 0

## take care of LD offset
GoToLowDoseArea V
SaveFocus 
SetStandardFocus 0

## Bring objective to Eucentric Focus. Not use normalize
## because it caused beam to shift (not stable) 
#NormalizeLenses 2
#Delay 1
Loop 3
# use View in LD
	G 1 1
EndLoop
CalEucentricFocus

## Restore Focus
RestoreFocus 

## restore original target defocus
SetTargetDefocus $orig

Same as before, it is even more convenient to do this calibration in Low Dose mode with View area, as it can stay in Low Dose mode and one calibration for View mag would be sufficient.

As you can see, we need to "forget" the likely huge defocus offset for View, and bring it back afterwards. Otherwise, it could take long time for Objective to get close to Eucentric Focus.

It is interesting to see the line


G 1 1 

in the macro. It means to Autofocus using View.