14 Check voltage and current rotation centers

This step is to align the beam to make it parallel to the axis of the columm. Make sure the obj. aperture is inserted and centered.

Note: The step size button on "Focus" is used to control the amplitude of the beam wobbling.

The steps used here only give "roughly" parallel beam to the axis. If you need very acurate "0" tilt beam, some extra tools and step will be needed, such as "Coma-Free" which is available on FEG scopes.